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Introducing the new LD Series RF Generators
The LD Series RF power generators deliver maximum rated output powers up to 2500 watts at frequencies of 13.56, 27.12, 40.68, 81.36 and 100 Mhz. New LDMOS transistors are at the heart of the design. These new transistors have lower thermal resistance, higher frequency capability and improved linearity. The low feedback capacitance of the transistors also improves spectral purity into non-linear plasma conditions. The transistors are rugged into all mismatched impedances including arc conditions. The extended frequency range results in increased plasma density, lower voltage, and higher yield for today’s state of the art requirements.
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